Grundfos
MEMS production to pump business
The company Grundfos relies on microelectromechanical systems (MEMS) to maintain its leading position as manufacturer of water pumps. By 2003, the company intends to start the production of micro pressure sensors based on MEMS technology. The new sensors will make the company's pumps more intelligent and less power consuming than the electronically regulated pumps already on the market.
With an annual production of 10 million pump units, Grundfos is one of the world's leading pump manufacturers. Traditional pressure sensors for water are equivalent to the size of a household matchbox and relatively expensive to produce. The microsensors that Grundfos plans to produce are tiny (4x4 mm) " P < pumps. smallest the even into integrated be can principle, in that, sensors pressure waterproof?>
Using its newly developed, patented technologies, Grundfos will produce the silicon wafers that the tiny sensors are cut from and protect the sensors' surface so they can withstand contact with water. The production will take place in the clean-room facilities rented from the company Ibsen Photonics, in Greater Copenhagen.
Grundfos began developing microsensor technology in partnership with several other companies at the Micro and Nano Technology Centre run by the Technical University of Denmark.